Issued Patents 2003
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6649541 | Method for preventing or reducing delamination of deposited insulating layers | David E. Brown, Michael J. Satterfield, Arturo N. Morosoff | 2003-11-18 |
| 6558963 | Method and system for controlling the plasma treatment of a titanium nitride layer formed by a chemical vapor deposition process | H. Jim Fulford | 2003-05-06 |
| 6514865 | Method of reducing interlayer dielectric thickness variation feeding into a planarization process | — | 2003-02-04 |
| 6512991 | Method and apparatus for reducing deposition variation by modeling post-clean chamber performance | Bradley Marc Davis, Craig W. Christian | 2003-01-28 |