Issued Patents 2003
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6657302 | Integration of low dielectric material in semiconductor circuit structures | Huili Shao, Susan Clay Vitkavage | 2003-12-02 |
| 6559062 | Method for avoiding notching in a semiconductor interconnect during a metal etching step | Stephen W. Downey, Thomas Wolf, Paul B. Murphey | 2003-05-06 |
| 6506673 | Method of forming a reverse gate structure with a spin on glass process | Yi Ma, Huili Shao, Joseph Ashley Taylor | 2003-01-14 |