Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6576563 | Method of manufacturing a semiconductor device employing a fluorine-based etch substantially free of hydrogen | Stephen W. Downey, Edward B. Harris | 2003-06-10 |
| 6559062 | Method for avoiding notching in a semiconductor interconnect during a metal etching step | Stephen W. Downey, Allen Yen, Thomas Wolf | 2003-05-06 |