Issued Patents 2003
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6657302 | Integration of low dielectric material in semiconductor circuit structures | Huili Shao, Allen Yen | 2003-12-02 |
| 6576980 | Surface treatment anneal of hydrogenated silicon-oxy-carbide dielectric layer | Huili Shao, Kurt G. Steiner | 2003-06-10 |
| 6548892 | Low k dielectric insulator and method of forming semiconductor circuit structures | Kurt G. Steiner | 2003-04-15 |