Issued Patents 2002
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6444541 | Method for forming lining oxide in shallow trench isolation incorporating pre-annealing step | Jun-Yang Lai, Jih-Hwa Wang, Chou-Jie Tsai, Chin-Te Huang, Su-Yu Yeh +2 more | 2002-09-03 |