Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6444541 | Method for forming lining oxide in shallow trench isolation incorporating pre-annealing step | Jun-Yang Lai, Jih-Hwa Wang, Chou-Jie Tsai, Chin-Te Huang, Meng-Shiun Shieh +2 more | 2002-09-03 |
| 6372663 | Dual-stage wet oxidation process utilizing varying H2/O2 ratios | Chien-Jiun Wang, Jih-Hwa Wang | 2002-04-16 |