Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6444541 | Method for forming lining oxide in shallow trench isolation incorporating pre-annealing step | Jun-Yang Lai, Jih-Hwa Wang, Chou-Jie Tsai, Su-Yu Yeh, Meng-Shiun Shieh +2 more | 2002-09-03 |
| 6440570 | Stable thin film oxide standard | — | 2002-08-27 |