Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6423646 | Method for removing etch-induced polymer film and damaged silicon layer from a silicon surface | Hsiu-Lan Lee, Pei-Wen Li | 2002-07-23 |
| 6376384 | Multiple etch contact etching method incorporating post contact etch etching | Erik S. Jeng, I-Ping Lee, Eddy Chiang | 2002-04-23 |