Issued Patents 2002
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6476488 | Method for fabricating borderless and self-aligned polysilicon and metal contact landing plugs for multilevel interconnections | Bi-Ling Chen, Chien-Sheng Hsieh | 2002-11-05 |
| 6472717 | Method for fabricating reduced contacts using retardation layers | H. C. Liu | 2002-10-29 |
| 6458706 | Method of forming contact using non-conformal dielectric liner | Eddy Chiang, I-Ping Lee, Kuei-Chuen Ho | 2002-10-01 |
| 6413813 | Method for making DRAM using an oxide plug in the bitline contacts during fabrication | — | 2002-07-02 |
| 6376384 | Multiple etch contact etching method incorporating post contact etch etching | Tzu-Shih Yen, I-Ping Lee, Eddy Chiang | 2002-04-23 |