Issued Patents 2002
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6476488 | Method for fabricating borderless and self-aligned polysilicon and metal contact landing plugs for multilevel interconnections | Erik S. Jeng, Chien-Sheng Hsieh | 2002-11-05 |