Issued Patents 2002
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6423646 | Method for removing etch-induced polymer film and damaged silicon layer from a silicon surface | Tzu-Shih Yen, Hsiu-Lan Lee | 2002-07-23 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6423646 | Method for removing etch-induced polymer film and damaged silicon layer from a silicon surface | Tzu-Shih Yen, Hsiu-Lan Lee | 2002-07-23 |