Issued Patents 2002
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6445440 | Motion feed-through into a vacuum chamber and its application in lithographic projection apparatuses | Theodorus Hubertus Josephus Bisschops, Jakob Vijfvinkel, Hermanus M. J. R. Soemers, Johannes C. Driessen, Michael J. M. Renkens | 2002-09-03 |
| 6421112 | Movable support in a vacuum chamber and its application in lithographic projection apparatuses | Theodorus Hubertus Josephus Bisschops, Hermanus M. J. R. Soemers, Jakob Vijfvinkel, Johannes C. Driessen, Michael J. M. Renkens | 2002-07-16 |
| 6337484 | Positioning device and lithographic projection apparatus comprising such a device | Erik Roelof Loopstra, Henricus Wilhelmus Aloysius Janssen, Harmen Klaas Van Der Schoot | 2002-01-08 |