Issued Patents 2002
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6493423 | METHOD OF GENERATING EXTREMELY SHORT-WAVE RADIATION, METHOD OF MANUFACTURING A DEVICE BY MEANS OF SAID RADIATION, EXTREMELY SHORT-WAVE RADIATION SOURCE UNIT AND LITHOGRAPHIC PROJECTION APPARATUS PROVIDED WITH SUCH A RADIATION SOURCE UNIT | — | 2002-12-10 |
| 6445440 | Motion feed-through into a vacuum chamber and its application in lithographic projection apparatuses | Jakob Vijfvinkel, Hermanus M. J. R. Soemers, Johannes C. Driessen, Michael J. M. Renkens, Adrianus G. Bouwer | 2002-09-03 |
| 6421112 | Movable support in a vacuum chamber and its application in lithographic projection apparatuses | Hermanus M. J. R. Soemers, Jakob Vijfvinkel, Johannes C. Driessen, Michael J. M. Renkens, Adrianus G. Bouwer | 2002-07-16 |