Issued Patents 2002
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6337484 | Positioning device and lithographic projection apparatus comprising such a device | Erik Roelof Loopstra, Adrianus G. Bouwer, Henricus Wilhelmus Aloysius Janssen | 2002-01-08 |