Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6380684 | Plasma generating apparatus and semiconductor manufacturing method | Yunlong Li, Masanobu Sato, Noriyoshi Sato, Satoru Iizuka | 2002-04-30 |
| 6376796 | Plasma processing system | Noriyoshi Sato, Satoru Iizuka, Tsukasa Yoneyama, Hiroyasu Sato, Unryu Ogawa +2 more | 2002-04-23 |