Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6380684 | Plasma generating apparatus and semiconductor manufacturing method | Yunlong Li, Masanobu Sato, Yoshio Tominaga, Noriyoshi Sato | 2002-04-30 |
| 6376796 | Plasma processing system | Noriyoshi Sato, Tsukasa Yoneyama, Hiroyasu Sato, Unryu Ogawa, Yoshio Tominaga +2 more | 2002-04-23 |