Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6380684 | Plasma generating apparatus and semiconductor manufacturing method | Yunlong Li, Yoshio Tominaga, Noriyoshi Sato, Satoru Iizuka | 2002-04-30 |
| 6353190 | Lattice-shaped circuit board | Tatsuya Sumida, Kazuhiro Aoki | 2002-03-05 |