Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6494223 | Wet cleaning apparatus utilizing ultra-pure water rinse liquid with hydrogen gas | Tadahiro Ohmi, Kazuhiko Kawada, Masatoshi Hashino, Noboru Kubota | 2002-12-17 |
| 6348157 | Cleaning method | Tadahiro Ohmi, Takahisa Nitta, Kazuhiko Kawada, Mitsunori Nakamori | 2002-02-19 |