Issued Patents 2002
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6494223 | Wet cleaning apparatus utilizing ultra-pure water rinse liquid with hydrogen gas | Tadahiro Ohmi, Kazuhiko Kawada, Toshihiro II, Noboru Kubota | 2002-12-17 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6494223 | Wet cleaning apparatus utilizing ultra-pure water rinse liquid with hydrogen gas | Tadahiro Ohmi, Kazuhiko Kawada, Toshihiro II, Noboru Kubota | 2002-12-17 |