Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6383946 | Method of increasing selectivity in silicon nitride deposition | Tzung-Hua Ying, Tang Yu, Cheng-Chieh Huang | 2002-05-07 |
| 6350707 | Method of fabricating capacitor dielectric | Jumn-Min Fan, Weichi Ting | 2002-02-26 |