Issued Patents 2002
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6383946 | Method of increasing selectivity in silicon nitride deposition | Tzung-Hua Ying, Tse-Wei Liu, Cheng-Chieh Huang | 2002-05-07 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6383946 | Method of increasing selectivity in silicon nitride deposition | Tzung-Hua Ying, Tse-Wei Liu, Cheng-Chieh Huang | 2002-05-07 |