Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6383946 | Method of increasing selectivity in silicon nitride deposition | Tzung-Hua Ying, Tang Yu, Tse-Wei Liu | 2002-05-07 |
| 6368935 | Method for upgrading quality of DRAM capacitor and wafer-to-wafer uniformity | Tommy Yu | 2002-04-09 |