Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6469448 | Inductively coupled RF plasma source | Youji Taguchi | 2002-10-22 |
| 6413392 | Sputtering device | Tsuyoshi Sahoda, Toshimitsu Uehigashi, Yasushi Higuchi, Kuniaki Nakajima | 2002-07-02 |