Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6413392 | Sputtering device | Tsuyoshi Sahoda, Toshimitsu Uehigashi, Kuniaki Nakajima, Tomoyasu Kondo | 2002-07-02 |
| 6337249 | Semiconductor device and fabrication process thereof | Hiroyuki Yamane, Mitsutaka Katada, Noriyuki Iwamori, Tsutomu Kawaguchi, Takeshi Kuzuhara | 2002-01-08 |