Issued Patents 2002
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6413392 | Sputtering device | Tsuyoshi Sahoda, Toshimitsu Uehigashi, Yasushi Higuchi, Tomoyasu Kondo | 2002-07-02 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6413392 | Sputtering device | Tsuyoshi Sahoda, Toshimitsu Uehigashi, Yasushi Higuchi, Tomoyasu Kondo | 2002-07-02 |