Issued Patents 2002
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6498074 | Thinning and dicing of semiconductor wafers using dry etch, and obtaining semiconductor chips with rounded bottom edges and corners | Oleg Siniaguine, Patrick B. Halahan | 2002-12-24 |
| 6448153 | Thinning and dicing of semiconductor wafers using dry etch, and obtaining semiconductor chips with rounded bottom edges and corners | Oleg Siniaguine, Patrick B. Halahan | 2002-09-10 |
| 6402843 | Non-contact workpiece holder | Oleg Siniaguine, Alex Berger, Igor Bagriy | 2002-06-11 |