Issued Patents 2002
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6498381 | Semiconductor structures having multiple conductive layers in an opening, and methods for fabricating same | Patrick B. Halahan | 2002-12-24 |
| 6498074 | Thinning and dicing of semiconductor wafers using dry etch, and obtaining semiconductor chips with rounded bottom edges and corners | Patrick B. Halahan, Sergey Savastiouk | 2002-12-24 |
| 6462300 | Monitoring and controlling separate plasma jets to achieve desired properties in a combined stream | — | 2002-10-08 |
| 6448153 | Thinning and dicing of semiconductor wafers using dry etch, and obtaining semiconductor chips with rounded bottom edges and corners | Patrick B. Halahan, Sergey Savastiouk | 2002-09-10 |
| 6448188 | Method of preventing motion of article in an article holder | Alex Berger | 2002-09-10 |
| 6423923 | Monitoring and controlling separate plasma jets to achieve desired properties in a combined stream | — | 2002-07-23 |
| 6420209 | Integrated circuits and methods for their fabrication | — | 2002-07-16 |
| 6402843 | Non-contact workpiece holder | Sergey Savastiouk, Alex Berger, Igor Bagriy | 2002-06-11 |
| 6398823 | Dynamic break for non-contact wafer holder | Alex Berger | 2002-06-04 |