Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6411387 | Stage apparatus, projection optical apparatus and exposure method | Naoyuki Yamamoto | 2002-06-25 |
| 6342941 | Exposure apparatus and method preheating a mask before exposing; a conveyance method preheating a mask before exposing; and a device manufacturing system and method manufacturing a device according to the exposure apparatus and method | Masahiro Nei, Hiroki Tateno, Jiro Inoue, Naomasa Shiraishi | 2002-01-29 |