Issued Patents 2002
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6421123 | Position detecting apparatus | — | 2002-07-16 |
| 6404482 | Projection exposure method and apparatus | — | 2002-06-11 |
| 6392740 | Projection exposure apparatus | Yuji Kudo | 2002-05-21 |
| 6377336 | Projection exposure apparatus | Yuji Kudo, Saburo Kamiya | 2002-04-23 |
| 6356343 | Mark for position detection and mark detecting method and apparatus | Nobutaka Magome | 2002-03-12 |
| 6342941 | Exposure apparatus and method preheating a mask before exposing; a conveyance method preheating a mask before exposing; and a device manufacturing system and method manufacturing a device according to the exposure apparatus and method | Masahiro Nei, Kenichiro Kaneko, Hiroki Tateno, Jiro Inoue | 2002-01-29 |
| 6335786 | Exposure apparatus | — | 2002-01-01 |