Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6492649 | Projection exposure apparatus, projection exposure method, optical cleaning method and method of fabricating semiconductor device | Taro Ogata | 2002-12-10 |
| 6342941 | Exposure apparatus and method preheating a mask before exposing; a conveyance method preheating a mask before exposing; and a device manufacturing system and method manufacturing a device according to the exposure apparatus and method | Kenichiro Kaneko, Hiroki Tateno, Jiro Inoue, Naomasa Shiraishi | 2002-01-29 |