YN

Yukio Naito

TL Tokyo Electron Limited: 1 patents #141 of 413Top 35%
Overall (2002): #83,486 of 266,432Top 35%
1
Patents 2002

Issued Patents 2002

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
6391147 Plasma treatment method and apparatus Kosuke Imafuku, Shosuke Endo, Kazuhiro Tahara, Kazuya Nagaseki, Keizo Hirose 2002-05-21