KT

Kazuhiro Tahara

TL Tokyo Electron Limited: 1 patents #141 of 413Top 35%
Overall (2002): #178,269 of 266,432Top 70%
1
Patents 2002

Issued Patents 2002

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
6391147 Plasma treatment method and apparatus Kosuke Imafuku, Shosuke Endo, Yukio Naito, Kazuya Nagaseki, Keizo Hirose 2002-05-21