Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6391147 | Plasma treatment method and apparatus | Kosuke Imafuku, Shosuke Endo, Kazuhiro Tahara, Yukio Naito, Keizo Hirose | 2002-05-21 |
| 6365060 | Method for controlling plasma processor | Hiroki Yamazaki | 2002-04-02 |