YN

Yoko Naito

TL Tokyo Electron Limited: 2 patents #58 of 413Top 15%
Overall (2002): #34,215 of 266,432Top 15%
2
Patents 2002

Issued Patents 2002

Showing 1–2 of 2 patents

Patent #TitleCo-InventorsDate
6443165 Method for cleaning plasma treatment device and plasma treatment system Takashi Akahori, Masaki Tozawa, Risa Nakase, Shuichi Ishizuka, Masahide Saito +1 more 2002-09-03
6355902 Plasma film forming method and plasma film forming apparatus Takashi Akahori, Masaki Tozawa, Risa Nakase, Osamu Yokoyama, Shuichi Ishizuka +4 more 2002-03-12