Issued Patents 2002
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6479897 | Semiconductor device having fluorine-added carbon dielectric film and method of fabricating the same | Akira Suzuki | 2002-11-12 |
| 6443165 | Method for cleaning plasma treatment device and plasma treatment system | Masaki Tozawa, Yoko Naito, Risa Nakase, Shuichi Ishizuka, Masahide Saito +1 more | 2002-09-03 |
| 6355902 | Plasma film forming method and plasma film forming apparatus | Masaki Tozawa, Yoko Naito, Risa Nakase, Osamu Yokoyama, Shuichi Ishizuka +4 more | 2002-03-12 |
| 6337290 | Semiconductor device having fluorine-added carbon dielectric film and method of fabricating the same | Akira Suzuki | 2002-01-08 |