Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6443165 | Method for cleaning plasma treatment device and plasma treatment system | Takashi Akahori, Masaki Tozawa, Yoko Naito, Risa Nakase, Shuichi Ishizuka +1 more | 2002-09-03 |
| 6355902 | Plasma film forming method and plasma film forming apparatus | Takashi Akahori, Masaki Tozawa, Yoko Naito, Risa Nakase, Osamu Yokoyama +4 more | 2002-03-12 |