Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6436193 | Gas processing apparatus baffle member, and gas processing method | Shigeru Kasai, Taro Komiya, Tomihiro Yonenaga | 2002-08-20 |
| 6372048 | Gas processing apparatus for object to be processed | Munehisa Futamura | 2002-04-16 |