MF

Munehisa Futamura

TL Tokyo Electron Limited: 1 patents #141 of 413Top 35%
Overall (2002): #148,787 of 266,432Top 60%
1
Patents 2002

Issued Patents 2002

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
6372048 Gas processing apparatus for object to be processed Teruo Iwata 2002-04-16