Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6483395 | Micro-machine (MEMS) switch with electrical insulator | Kenichirou Suzuki, Yoshinori Ota, Tatsumi Ide | 2002-11-19 |
| 6436193 | Gas processing apparatus baffle member, and gas processing method | Teruo Iwata, Taro Komiya, Tomihiro Yonenaga | 2002-08-20 |