Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6403498 | Method and device for treating substrate | Takenobu Matsuo, Tsuyoshi Wakabayashi, Teruyuki Hayashi | 2002-06-11 |
| 6337365 | Electronic/electric components used in clean room and substrate treatment apparatus | Takenobu Matsuo, Tsuyoshi Wakabayashi, Sadao Kobayashi, Yoshihide Wakayama, Masayuki Imafuku | 2002-01-08 |