Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6403498 | Method and device for treating substrate | Takenobu Matsuo, Tsuyoshi Wakabayashi, Misako Saito | 2002-06-11 |
| 6344387 | Wafer boat and film formation method | Kazuhide Hasebe, Atsumi Ito, Kenji Tago | 2002-02-05 |