Issued Patents 2002
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6471740 | Air filter | Masayuki Imafuku, Yoshihide Wakayama | 2002-10-29 |
| 6427462 | Semiconductor manufacturing facility, semiconductor manufacturing apparatus and semiconductor manufacturing method | Osamu Suenaga, Tadahiro Ohmi | 2002-08-06 |
| 6370897 | Semiconductor manufacturing facility | Osamu Suenaga, Tadahiro Ohmi | 2002-04-16 |
| 6337365 | Electronic/electric components used in clean room and substrate treatment apparatus | Takenobu Matsuo, Tsuyoshi Wakabayashi, Misako Saito, Yoshihide Wakayama, Masayuki Imafuku | 2002-01-08 |