Issued Patents 2002
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6500487 | Abatement of effluent from chemical vapor deposition processes using ligand exchange resistant metal-organic precursor solutions | Rebecca Faller, Glenn M. Tom, Jose I. Arno, Ray Dubois | 2002-12-31 |
| 6491884 | In-situ air oxidation treatment of MOCVD process effluent | Rebecca Faller | 2002-12-10 |
| 6391267 | Method of reducing internal combustion engine emissions, and system for same | Richard J. Martin, John D. Stilger, John D. Young, Michael P. Barkdoll, Bradley L. Edgar | 2002-05-21 |
| 6391385 | Method of abating of effluents from chemical vapor deposition processes using organometallic source reagents | Ray Dubois, Jose I. Arno, Rebecca Faller, Glenn M. Tom | 2002-05-21 |
| 6338312 | Integrated ion implant scrubber system | Michael W. Hayes, Jose I. Arno | 2002-01-15 |