Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6500487 | Abatement of effluent from chemical vapor deposition processes using ligand exchange resistant metal-organic precursor solutions | Mark Holst, Rebecca Faller, Glenn M. Tom, Jose I. Arno | 2002-12-31 |
| 6391385 | Method of abating of effluents from chemical vapor deposition processes using organometallic source reagents | Mark Holst, Jose I. Arno, Rebecca Faller, Glenn M. Tom | 2002-05-21 |