Issued Patents 2002
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6500487 | Abatement of effluent from chemical vapor deposition processes using ligand exchange resistant metal-organic precursor solutions | Mark Holst, Rebecca Faller, Jose I. Arno, Ray Dubois | 2002-12-31 |
| 6474076 | Fluid storage and dispensing system featuring externally adjustable regulator assembly for high flow dispensing | Luping Wang, James Dietz, Steven M. Lurcott, Steven J. Hultquist | 2002-11-05 |
| 6406519 | Gas cabinet assembly comprising sorbent-based gas storage and delivery system | James V. McManus | 2002-06-18 |
| 6391385 | Method of abating of effluents from chemical vapor deposition processes using organometallic source reagents | Mark Holst, Ray Dubois, Jose I. Arno, Rebecca Faller | 2002-05-21 |
| 6360546 | Fluid storage and dispensing system featuring externally adjustable regulator assembly for high flow dispensing | Luping Wang, James Dietz, Steven M. Lurcott, Steven J. Hultquist | 2002-03-26 |
| 6343476 | Gas storage and dispensing system comprising regulator interiorly disposed in fluid containment vessel and adjustable in situ therein | Luping Wang | 2002-02-05 |