Issued Patents 2002
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6465265 | Analysis of interface layer characteristics | Jingmin Leng | 2002-10-15 |
| 6452685 | Apparatus for evaluating metalized layers on semiconductors | Li-Yi Chen | 2002-09-17 |
| 6453006 | Calibration and alignment of X-ray reflectometric systems | Louis N. Koppel, Craig E. Uhrich | 2002-09-17 |
| 6449043 | Broadband spectroscopic rotating compensator ellipsometer | David E. Aspnes | 2002-09-10 |
| 6429943 | Critical dimension analysis with simultaneous multiple angle of incidence measurements | Allan Rosencwaig | 2002-08-06 |
| 6417921 | Apparatus for analyzing multi-layer thin film stacks on semiconductors | Allan Rosencwaig | 2002-07-09 |
| 6411385 | Thin film optical measurement system and method with calibrating ellipsometer | David E. Aspnes, Jeffrey T. Fanton | 2002-06-25 |
| 6408048 | Apparatus for analyzing samples using combined thermal wave and X-ray reflectance measurements | Allan Rosencwaig | 2002-06-18 |