Issued Patents 2002
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6429943 | Critical dimension analysis with simultaneous multiple angle of incidence measurements | Jon Opsal | 2002-08-06 |
| 6417921 | Apparatus for analyzing multi-layer thin film stacks on semiconductors | Jon Opsal | 2002-07-09 |
| 6408048 | Apparatus for analyzing samples using combined thermal wave and X-ray reflectance measurements | Jon Opsal | 2002-06-18 |