Issued Patents 2002
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6449043 | Broadband spectroscopic rotating compensator ellipsometer | Jon Opsal | 2002-09-10 |
| 6411381 | Method of reducing noise generated by arc lamps in optical systems employing slits | Martin Ebert | 2002-06-25 |
| 6411385 | Thin film optical measurement system and method with calibrating ellipsometer | Jon Opsal, Jeffrey T. Fanton | 2002-06-25 |