Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6377641 | Reproduction apparatus and reproduction method | Takashi Katayama, Takeshi Fujita, Masahiro Sueyoshi, Kazutaka Abe, Masaharu Matsumoto +3 more | 2002-04-23 |
| 6351367 | Electrostatic holding apparatus having insulating layer with enables easy attachment and detachment of semiconductor object | Hiroshi Mogi, Yoshikazu Ohtani, Kenichi Arai, Toshimi Kobayashi | 2002-02-26 |