Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6376977 | Silicon electrode plate | Makoto Kawai, Keiichi Goto, Kazuyoshi Tamura, Yoshihiro Kubota | 2002-04-23 |
| 6351367 | Electrostatic holding apparatus having insulating layer with enables easy attachment and detachment of semiconductor object | Hiroshi Mogi, Yoshikazu Ohtani, Kenichi Arai, Shinji Kojima | 2002-02-26 |